| | Energy Control Systems can help you establish your production facilities with some of the best, tried and tested furnaces. We look after different market sectors including solar, wafer level packaging, semiconductor, pharmaceutical, aerospace, automotive, electronics, industrial materials such as composites, aluminum, carbon fiber and many more.
SEMICONDUCTOR MANUFACTURING THERMAL
PROCESSING AREAS | 1. Annealing of Copper Wafers | 2. Photo Resist | | 3. Develop and Bake | 4. Die Attach | | 5. Burn In and Test | 6. After any Cleaning Process |
| | | MATERIAL MARKET | | The furnaces we provide are generally used for, |
| 1. Annealing | 2. Curing | | 3. Stress Relieving | 4. Hardening | | 5. Drying | 6. Testing | | 7. Aging | |
| | | | MEDICAL APPLICATIONS | | Despatch Industries make dedicated products used world wide and supported for applications related to but not limited to, |
| 1. Dry Heat Sterilization | 2. Depyrogenation | | 3. Drying | 4. Ultra violet decontamination | | 5. Granulation Drying | | | |
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| | THERMCO / TETREON FURNACES | | Thermco brand of furnaces are oldest in the industry horizontal diffusion furnaces used in electronics and solar industry. Together with industry benchmark Thermco TMX process controls and excellent after sales service and support, this brand occupies a major chunk of market in this field. These furnaces support following processes; |
| • Silicon Nitride | Model 2400-2600(PDF) | | • Ramped Temperature Poly | | | • Uniform Grain Poly (Flat Temp) | Model VTP 1500(PDF) | | • TEOS | | | • VLTO | Model HTR 62(PDF) | | • BPSG | | | • High Temperature Oxide | Model HTR 52 (PDF) | | • 5 or 6 Loop Pyro with DCE (TCA) or HCL | | | • 2 or 4 Loop Liquid Dopant (POCL3 or BBR3) | | | • 2 Loop forming Gas Anneal | | | • High Temperature High Flow Anneal | | | • Low Temperature Anneal or Cure | | | | |
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